Silicon photonic systems rely increasingly on micro-electro-mechanical systems (MEMS) actuators to provide precise beam steering, wavelength tuning, and optical switching. These applications demand ...

Actuators with built-in encoders and precision guidance enable position, speed and force adjustments on-the-fly without mechanical reconfiguration or production delays. Integrated diagnostics monitor ...

At a time of surging demand for electric energy, the power industry has to ensure reliable and stable supply with the flexibility needed to handle intermittent wind and solar generation. Through ...

This study introduces a newly optimized triangular-finger electrostatic comb-drive actuator designed to significantly enhance force intensity and travel range within a compact footprint. By refining ...